ACM Research Announces Major Performance Breakthrough for Ultra C Tahoe Cleaning Tool for Front-End Semiconductor Manufacturing

ACM Research, Inc., a supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging applications, today announced a major performance breakthrough for its flagship Ultra C Tahoe Cleaning tool.

ACM Research, Inc., a supplier of wafer processing solutions for semiconductor and advanced wafer-level packaging applications, today announced a major performance breakthrough for its flagship Ultra C Tahoe Cleaning tool. The resulting enhancements are designed to meet demanding technical requirements of advanced nodes for foundry, logic and memory applications.
The Ultra C Tahoe now achieves the performance of standalone single-wafer cleaning tools on low-to-medium temperature sulfuric peroxide mix (SPM) processes. Tahoe’s patented hybrid architecture is among the first in the industry to combine batch wafer processing and single wafer cleaning chambers into the same SPM tool. The hybrid architecture delivers enhanced cleaning performance, high throughput, and process flexibility, with up to 75% reduction in chemical consumption. ACM estimates cost savings of up to $500,000 per year from sulfuric acid alone, with additional environmental and cost benefits from reduced sulfuric acid treatment and disposal.
“With the rise of AI to the forefront of consumers’ minds, we expect increased public attention on the environmental impact of semiconductor chip manufacturing. We believe ACM’s Ultra C Tahoe is well-positioned to help customers increase production of advanced AI chips, but with a reduced footprint on the environment,” said Dr. David Wang, ACM’s President and Chief Executive Officer.
 “We believe the Ultra C Tahoe is another example of excellence from ACM’s innovative and world-class R&D team,” Dr. Wang added. “We believe the Tahoe platform is well-positioned to capture market share within the SPM market, particularly in middle and low-temperature applications, which believe represents an estimated 20% of the total clean market.”
The upgraded Ultra C Tahoe is now in production at several high-volume customer facilities in mainland China. Additional logic and memory customers are evaluating the tool, and we expect to deliver additional production units through the end of 2024.
New Features and Benefits of the Upgraded Ultra C Tahoe Tool:
Visit ACM at SEMICON Europa
To learn more about the upgraded Ultra C Tahoe platform, please visit us at SEMICON Europa, booth C2265, from November 12-15, 2024, in Munich, Germany.
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