Dr. Suvi Haukka, executive scientist at ASM International, located in Finland, was awarded the ALD Innovation prize at the ALD 2016 Ireland conference (Figure), as chosen by the conference chairs. Haukka has had a lifetime career in Atomic Layer Deposition (ALD), starting at Microchemistry Ltd. with ALD pioneer Dr. Tuomo Suntola in 1990, and now holding over 100 patents.
Since ASM bought Microchemistry in 1999, Haukka has worked on the manufacturability of ALD processes for the semiconductor industry. Today, ALD technology is essential for the high-volume manufacturing (HVM) of advanced ICs, with growing demand for the fabrication of nanoscale 3D devices such as finFETs and 3D-NAND Flash cells.
As reported by Riikka Puurunen in his ALD History Blog, Haukka joins a short list of technology luminaries who have been previous recipients of the prize:
* 2011 Roy Gordon (Harvard University),
* 2012 Markku Leskelä (University of Helsinki),
* 2013 Steven George (University of Colorado),
* 2014 Hyeongtag Jeon (Hanyang University), and
* 2015 Gregory Parsons (North Carolina State University).
More on the ALD 2016 conference can be read in the travel report blog.
[DISCLAIMER: Ed Korczynski and Jonas Sundqvist also work for TECHCET CA, and were co-chairs of the 2016 Critical Materials Conference.]
—E.K.