The ALD20’s patent-pending design maximizes production process efficiency and deposition consistency by providing flow coefficients two to three times what can be achieved using today’s standard ALD valve technology.
Nanoscale Features through Atomic Layer Processing
Atomic layer etching and deposition processes offer atomic scale control through the use of self-limiting reactions.
SLO Cables for Vacuum Application
A new solution that combines ‘super’ low outgassing (SLO) cables with flexibility and integration of multiple cables is designed for applications with moving parts in vacuum chamber environments ranging from motors to encoders.
Clock Tree Optimization Methodologies for Power and Latency Reduction
Widely used clock structures are described, with an emphasis on practical implementations of conventional clock tree structures along with H-Tree.
EUV Lithography: Sailing Along the Stochastic Cliffs
Stochastic printing failures are random, non-repeating, isolated defects such as microbridges, locally broken lines and missing or merging contacts.
EUV Lithography: Weighing the Options for Future Logic and Memory Applications
Imec takes a great leap forward in understanding and pushing the limits of extreme ultraviolet lithography – part I
Abating Potentially Dangerous Particles 2.5 µm and Smaller
Particles, especially fine particles, are very important because of their impact on human health.
Surface Preparation for Low Temperature CVD Si Epitaxy Processing
Methods for producing the pristine and stable hydrogen-terminated single crystal silicon surfaces required to achieve the specifications for LT CVD epi silicon layers are investigated.
2020: Never This Slow Again
“Change has never been this fast and it will never be this slow again,” said SEMI’s Dave Anderson, speaking at ISS earlier this month. I summarized five of the talks that I found most interesting.
Executive Viewpoints: 2020 Outlook
Each year, Semiconductor Digest turns to industry leaders to hear viewpoints on the technological and economic outlook for the upcoming year. Read through these expert opinions on what to expect in 2020.
