At IEDM last year, Intel gave a half-dozen papers on various topics, including two on their 22FFL SoC process aimed at low power IoT and mobile products. The first (14.1) was an invited presentation on “Intel 22nm FinFET (22FFL) Process Technology for RF and mmWave Applications and Circuit Design Optimization for FinFET Technology”, and the second (18.1) introduced “MRAM as Embedded Non-Volatile Memory Solution for 22FFL FinFET Technology”. I had…
Semiconductors
Process Watch: Monitoring for Excursions in Automotive Fabs
By David W. Price, Jay Rathert and Douglas G. Sutherland Author’s Note: The Process Watch series explores key concepts about process control—defect inspection, metrology and data analytics—for the semiconductor industry. This article is the fourth in a series on process control strategies for automotive semiconductor devices. The first three articles1-3 in this series discussed methods that automotive semiconductor manufacturers can use to better meet the challenging quality requirements of their…
Process Watch: Automotive Defect Sensitivity Requirements
By David W. Price, Douglas G. Sutherland, Jay Rathert, John McCormack and Barry Saville Author’s Note: The Process Watch series explores key concepts about process control—defect inspection, metrology and data analytics—for the semiconductor industry. This article is the third in a series on process control strategies for automotive semiconductor devices. For this article, we are pleased to include insights from our colleagues at KLA-Tencor, John McCormack and Barry Saville. Semiconductors…
Process Watch: Yield management turns green
By David W. Price, Douglas G. Sutherland and Kara L. Sherman Author’s Note: The Process Watch series explores key concepts about process control—defect inspection and metrology—for the semiconductor industry. Following the previous installments, which explored the 10 fundamental truths of process control, this new series of articles highlights additional trends in process control, including successful implementation strategies and the benefits for IC manufacturing. For this article, we are pleased to…