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Omhi kept us Ultra-Clean

Sadly, I just recently learned from the UCPSS 2016 website that Ohmi-sensei—Professor Doctor Tadahiro Ohmi—passed away in Sendai on 21 February 2016. As the guru of ultra-clean technology, he established the global Ultra Clean Society in 1988, founded the International Symposium of Semiconductor Manufacturing (ISSM) in 1992, served as program committee member of the UCPSS between 1992 and 2006, and was an IEEE Fellow. Ohmi was a Professor of New…

10 Reasons to Attend The ConFab this June

The ConFab Conference and Networking Event will be held June 12-15. Presented by Solid State Technology, this executive-level event is designed exclusively for those driving growth and innovation in the semiconductor industry. With a theme the “New Age of Innovation for Semiconductors,” it features deep insights on the challenges and opportunities facing the industry and also offers powerful networking opportunities. Here are my top 10 reasons to register now. The…

Andy Grove blessed us all

Andy Grove, the man who codified the commercial IC industry dynamic as “Only the Paranoid Survive” died yesterday at the age of 79. His instinctive paranoia derived from his tragic experiences while growing up in Hungary, as referenced by Wikipedia in the prolog to “Swimming Across: a Memoir”: By the time I was twenty, I had lived through a Hungarian Fascist dictatorship, German military occupation, the Nazis’ “Final Solution,” the…

SAQP Specs for 7nm finFETs

As discussed in my last Ed’s Threads, lithography has become patterning as evidenced by first use of Self-Aligned Quadruple Patterning (SAQP) in High Volume Manufacturing (HVM) of memory chips. Meanwhile, industry R&D hub imec has been investigating use of SAQP for “7nm” and “5nm” node finFET HVM, as reported as SPIE-AL this year in Paper 9782-12. The specifications for pitches ranging from 18 to 24 nanometers are as follow: 7.0nm…

Litho becomes Patterning

Once upon a time, lithographic (litho) processes were all that IC fabs needed to transfer the design-intent into silicon chips. Over the last 10-15 years, however, IC device structural features have continued to shrink below half the wavelength of the laser light used in litho tools, such that additional process steps are needed to form the desired features. Self-Aligned Double Patterning (SADP) schemes use precise coatings deposited as “spacers” on…

3D XPoint uses PCM Material in ReRAM Device

IM Flash pre-announced “3D XPoint”(TM) memory for release later this year, and lack of details has led to widespread confusion regarding what it is. EETimes has reported that, “Chalcogenide material and an Ovonyx switch are magic parts of this technology with the original work starting back in the 1960’s,” said Guy Blalock, co-CEO of IM Flash at the 2016 Industry Strategy Symposium hosted by the SEMI trade group. However, contradicting…

Does Consolidation Put Innovation at Risk?

Consolidation in the semiconductor industry continues apace, with more than $100 billion in mergers and acquisitions announced in 2015, and more to come in 2016. “With our industry growth rates being so low, it’s a lot cheaper to acquire market share than it is to invest and beat your competitor over the head,” said analyst Bill McClean, speaking at SEMI’s Industry Strategy Symposium (ISS) in January. One potentially negative impact…

Controlling Polymers to Tune TFTs

Thin-film transistors (TFT) created using only additive process steps could create new low-cost ICs with functionalities beyond silicon, but only if we understand how to control structures at the molecular level. Thin films of conjugated polymers such as poly(3-hexylthiophene) (P3HT) can provide useful conductivity when the electron mobilities are controlled within as well as between molecules. In producing TFTs using such organic macromolecules, we must rigorously control the deposition and…

Viewpoints: 2016 outlook

Each year, Solid State Technology turns to industry leaders to hear viewpoints on the technological and economic outlook for the upcoming year. Read through these expert opinions on what to expect in 2016. New technologies will fuel pockets of growth in 2016 By Mike Plisinski, Chief Executive Officer, Rudolph Technologies, Inc. While the 2016 outlook for the semiconductor industry as a whole appears increasingly uncertain, there are areas where significant…

CMOS-Photonic Integration Thermally Sensitive

As published in the journal Nature, CMOS transistors have been integrated with optical-resonator circuits using complex on-chip sensors and heaters to maintain temperature to within 1°C. While lacking the laser-source, these otherwise-fully-integrated solutions demonstrate both the capability as well as the limitation of trying to integrate electronics and photonics on a single-chip. The Figure shows a simplified schematic cross-section of the device. Lead author Chen Sun—affiliated with UC Berkeley and…

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