ATS2 and ATSR are multi camera sensors used with CyberSpectrum software to teach accurate wafer and reticle hand-off calibration for proper alignment and set-up of semiconductor tools. The sensors “see” inside to capture three dimensional off-set data (x, y and z) in real-time to quickly teach wafer and reticle transfer positions – all without opening the tools. Process and equipment engineers can conduct repeatable and reproducible setups and maintenance checks, speed trouble-shooting and eliminate technician-to-technician variation.
“Semiconductor fabs worldwide are using our teaching sensors that are recognized as the most efficient and effective wireless devices for wafer hand-off teaching,” said Dr. Subodh Kulkarni, President and CEO, CyberOptics. “We have advanced the technology to enable even better performance, with the combination of accuracy, precision and versatility that fabs rely on to significantly improve their yields and tool uptime.”
CyberOptics also will demonstrate WaferSense sensors for leveling, vibration, gapping, relative humidity, resistance and airborne particles.