Entegris, Inc., a supplier of advanced materials and process solutions for the semiconductor and other high-technology industries, announced it has entered into a long-term supply agreement with onsemi, a leading manufacturer of advanced energy-efficient power semiconductors. Under the terms of the agreement, Entegris will provide onsemi a broad range of co-optimized chemical mechanical planarization (CMP) solutions for silicon carbide (SiC) applications.
“Over the past four years, Entegris has leveraged its technology and innovation to become a leader in the growing SiC market, and we are pleased to enter into this long-term supply agreement with onsemi. Entegris will provide our leading CMP solutions to onsemi to assist the company in meeting the growing demands of its customers and the overall market,” said Bertrand Loy, president and CEO of Entegris.
While SiC offers critical advantages for the manufacture of advanced semiconductors, it is a very hard material that is naturally dense and chemically inert, making it difficult to achieve the desired surface quality on the wafer. With its complementary suite of CMP solutions including slurries, pads, brushes, and post-CMP cleans, Entegris is a leader for CMP solutions that enable the high-volume manufacture of SiC wafers.
According to Dann Woodland, president of Entegris’ Materials Solutions, “Entegris recognizes the compelling long-term prospects of silicon carbide technologies, which are increasingly relied on by manufacturers in a number of industries, including electric vehicles, power devices, renewable energy, wireless communication, and cloud computing. Our broad portfolio of CMP solutions enables high-volume manufacturers of SiC wafers such as onsemi to polish such wafers with high yield and low defectivity.”
“Both parties are excited about the opportunities that this partnership presents. We believe Entegris is well-positioned to offer complementary solutions, such as specialty gases, precursors, and graphite, to meet onsemi’s needs across other semiconductor manufacturing processes,” Mr. Woodland said.
“onsemi is one of only a few companies globally to manufacture SiC-based semiconductors from crystal growth to advanced packaging solutions, and we recognize Entegris’ ability to innovate and provide the latest in CMP solutions for silicon carbide,” said Nana Tseng, chief procurement officer and vice president external manufacturing at onsemi. “The agreement with Entegris enables us to reliably meet our customers’ rapidly increasing demand for innovative technologies that improve the energy efficiency in their applications.”
