Improving Yield, Productivity and Product Safety using SemiQCM and Smart Sensor Technology

Originally held on May 31, 2023
Now available for On Demand viewing

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Overview:

Semiconductor manufacturing demands high productivity, high quality, and most importantly product safety.  INFICON’s SemiQCMTM, as part of the FabGuard®-enabled Smart Sensor portfolio, allows users to minimize downtime, monitor and optimize wafer processing, and ensure product safety with a compact, simple to use technology.

SemiQCM provides in-situ and real-time monitoring of deposition rates in critical areas of deposition, etch and other semiconductor equipment.  Users can monitor the presence of process materials to ensure that tools and gas delivery systems are working properly.  SemiQCM can measure small changes in the film deposition thickness and rate, to gain insight into processes occurring directly on the wafer.  This information can also be used to predict maintenance activities to increase uptime and minimize particle risk.

By incorporating the SemiQCM data with the tool-wide FabGuard System, users are able to get a complete view of how the machine is operating and how systems are interacting.  SemiQCM is a key part of the INFICON overall Smart Sensing Ecosystem.

What you’ll learn:

  • SemiQCM system overview
  • How SemiQCM is being used for precursor delivery monitoring
  • Technique to detect chamber clean endpoint
  • On-wafer and process chamber deposition monitoring
  • SemiQCM as part of the INFICON FabGuard Smart Sensor Ecosystem

Presented by:

Jonathan David
Semi Market Manager
INFICON

About the Presenter:

Jonathan David is the Semi Market Manager at INFICON.  He has an M.Sc. in Physics and has more than 15 years of industry experience working with semiconductor equipment manufacturers and end-users across a variety of applications.

Moderated by:

Pete Singer
Editor-in-Chief
Semiconductor Digest

Sponsored by:

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About INFICON:

INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and Smart Manufacturing/Industry 4.0 software solutions that enhance productivity and quality of tools, processes and complete factories. These analysis, measurement and control products are essential for gas leak detection in air conditioning/refrigeration, and automotive manufacturing. They are vital to equipment manufacturers and end-users in the complex fabrication of semiconductors and thin film coatings for optics, flat panel displays, solar cells and industrial vacuum coating applications. Other users of vacuum based processes include the life sciences, research, aerospace, packaging, heat treatment, laser cutting and many other industrial processes. We also leverage our expertise in vacuum technology to provide unique, toxic chemical analysis products for emergency response, security, and environmental monitoring. INFICON is headquartered in Switzerland and has world-class manufacturing facilities in Europe, the United States and China, as well as subsidiaries in China, Denmark, Finland, France, Germany, India, Italy, Japan, Korea, Liechtenstein, Mexico, Singapore, Sweden, Switzerland, Taiwan, the United Kingdom and the United States. INFICON registered shares (IFCN) are listed on SIX Swiss Exchange. For more information about INFICON and its products, please visit www.inficon.com.