JSR announced that it completed the acquisition of Corvallis, OR-based Inpria Corporation on Oct. 29, making it a wholly owned subsidiary of JSR. Inpria, now a JSR company, is a world leader in metal oxide photoresist design, development and manufacturing for extreme ultraviolet (EUV) lithography.
Inpria will immediately begin integrating into the JSR family but will retain the name Inpria at this time and remain headquartered in Oregon, effectively expanding JSR’s Oregon footprint to three locations. JSR’s General Manager of Advanced Lithography Material Business Promotion Department and Corporate Officer, Toru Kimura, will lead the integration and EUV expansion efforts.
Toru spent several years leading JSR’s Yokkaichi R&D Center and working closely with global customers and consortia including imec in Belgium. Prior to his current role, Toru served as CTO.
The implementation of EUV technology is on the rise, specifically in the most advanced lithography processes at leading-edge semiconductor manufacturing sites and the acquisition of Inpria positions JSR to address a broader set of customer needs.
