New Spatial Light Modulators (SLM) allow a single light source to be parallelized into thousands or millions of smaller light beams that can be used to write simultaneously. With this new capability, machines with higher throughput can expose the entire wafer surface in a reasonable amount of time. Read more…
Maskless Lithography Microfabrication for High Volume Production
New Spatial Light Modulators (SLM) allow a single light source to be parallelized into thousands or millions of smaller light beams that can be used to write simultaneously. With this new capability, machines with higher throughput can expose the entire wafer surface in a reasonable amount of time.