Samco Inc. (TSE: 6387), a manufacturer of semiconductor processing equipment, announced the sale of two of its advanced ICP-RIE systems, RIE-400iP, to III-V Lab, a prominent industrial research lab based in France. This strategic collaboration underscores Samco’s commitment to supporting cutting-edge research and development in the field of III-V semiconductors and their integration with silicon circuits.
III-V Lab, a joint lab between Nokia, Thales, and CEA, is dedicated to the industrial research and development of optoelectronic and microelectronic components based on III-V semiconductors. The lab’s expertise in compound semiconductor devices using Indium Phosphide (InP), Gallium Nitride (GaN), Gallium Arsenide (GaAs), and Gallium Antimonide (GaSb) aligns perfectly with Samco’s innovative etching technology.
The RIE-400iP is a load lock Inductively Coupled Plasma (ICP) etching system designed to handle wafers up to ø100 mm (4”). The advanced ICP Source HSTC™ (Hyper Symmetrical Tornado Coil) effectively delivers uniform, high-density plasma and ensures excellent etch profiles. This system with robust and reliable hardware provides exceptional process control, achieving high productivity for a wide range of etching applications, including InP, GaN, GaAs, SiC, and various materials.
Tsukasa Kawabe, President and COO of Samco Inc., stated, “We are pleased to introduce our top-notch equipment to a new customer in Europe. To date, we have successfully served numerous clients with our expertise in compound semiconductor applications, and we are looking forward to having our systems aid the research into the potential wide-ranging and expanding capabilities of compound semiconductor materials.”
This deal marks a significant milestone for Samco as it continues to expand its presence in the European market. The etching systems supplied to III-V Lab will play a crucial role in their ongoing projects aimed at enhancing the performance and integration of III-V semiconductors with silicon technology.
Dr. Alexandre Larrue, Research Engineer of III-V Lab, commented, “Dry etching is a key technological building block for the development of III-V semiconductor innovative devices. The purchase of RIE-400iP ICP etching systems from Samco will allow III-V Lab to address new challenges in compound semiconductor manufacturing and reinforce both its R&D activities and its small volume production. III-V Lab is glad to make the choice of Samco as ICP etching systems supplier.”
For over four decades, Samco has been at the forefront of semiconductor and electronic component manufacturing, providing over 4,600 systems to clients in 35 countries. This latest partnership with III-V Lab further cements Samco’s reputation as a global leader in the semiconductor industry.
