At SEMI’s 2020 Industry Strategy Symposium (ISS), held January 12-15th at Half Moon Bay in California, Marco Pieters, Vice President, EUV Product Marketing, ASML provided a status report on EUV’s acceptance in high volume manufacturing and an update on progress toward the company’s next-gen high NA tool.
Reliable ICs from unreliable devices
In an article published in the most recent issue of imec’s online magazine (http://magazine.imec.be/) titled “Chips must learn how to feel pain and how to cure themselves,” researchers Francky Chatthoor and Guido Groeseneken discuss how to build reliable “5nm-node” ICs…