At SEMICON West 2022, Heidi Van Ee and Darby Brown from the new Digital Solutions business at EMD Electronics spoke to Pete Singer, Editor-in-Chief of Semiconductor Digest about how data analytics is changing the conventional ways of controlling material quality in semiconductor manufacturing.
How Integrated Materials Solutions Speed Innovation
New solutions that rely on a unified database, machine learning and simulations are able to test, validate and provide customer insights into how materials work for new devices process flows, thereby speeding innovation.
Mitigation of Pattern Collapse in EUVL
Rinse materials offer benefits of pattern collapse mitigation and defect improvement and, therefore, superior process margins for yield improvement. Defectivity is also significantly improved with an EUV rinse.
