Lam Archives - Semiconductor Digest

Nanoscale Features through Atomic Layer Processing

Atomic layer etching and deposition processes offer atomic scale control through the use of self-limiting reactions.

Bottoms-up ELD of Cobalt Plugs

As reported in more detail at Solid State Technology, during the IEEE IITC now happening in Grenoble, imec and Lam showed a new Electroless Deposition (ELD) cobalt (Co) process that is claimed to provide void-free bottoms-up pre-filling of vias and…

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