Merck Archives - Semiconductor Digest

How Integrated Materials Solutions Speed Innovation

New solutions that rely on a unified database, machine learning and simulations are able to test, validate and provide customer insights into how materials work for new devices process flows, thereby speeding innovation.

Mitigation of Pattern Collapse in EUVL

Rinse materials offer benefits of pattern collapse mitigation and defect improvement and, therefore, superior process margins for yield improvement. Defectivity is also significantly improved with an EUV rinse.

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