Sub-Fab Archives - Semiconductor Digest

Sub-fab Improvements Require Reliable Real-time and High Sensitivity In-situ Data

Robust, high speed and high sensitivity real-time data monitoring is essential for enabling rapid response and tight feedback loops.

Energetic Materials in the Sub-fab: Protecting Personnel and Productivity

Most incidents with energetic materials occur in the sub-fab where material can accumulate in vacuum lines and pumps. Careless behavior can result in catastrophic failures that injure personnel, damage equipment, and halt production.

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