supervia Archives - Semiconductor Digest

Scaling the BEOL: A Toolbox Filled with New Processes, Boosters and Conductors

Extending interconnects towards the 3nm technology node and beyond requires several innovations. Imec sees single-print EUV in dual-damascene modules, Supervia structures, semi-damascene modules and added functionality in the back-end-of-line (BEOL) as the way forward.

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